Effect of aging on wettability of silicon surfaces modified by Ar implantation
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1516866
Reference9 articles.
1. Engineering tribological surfaces by ion implantation
2. Electrical characterization of Fe-doped semi-insulating InP after helium bombardment at different implant temperatures
3. Effect of implanted metal impurities on superconducting tungsten films
4. Surface chemical reaction between polycarbonate and kilo‐electron‐volt energy Ar+ ion in oxygen environment
5. Modification of wetting properties of SiOx surfaces by Ar implantation
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