1. Kotel’nikov Institute of Radioengineering and Electronics, Russian Academy of Sciences 1 , Moscow 125009, Russia
2. Moscow Power Engineering Institute 2 , Moscow 111250, Russia
3. Moscow Institute of Physics and Technology 3 , Dolgoprudny 141701, Russia
4. Nanoelectronics and Photonics Department, HSE University 4 , Moscow 101000, Russia
5. Magnetic Metamaterials Laboratory, Saratov State University 5 , Saratov 410012, Russia