Cyclic evolution of the electron temperature and density in dusty low-pressure radio frequency plasmas with pulsed injection of hexamethyldisiloxane-Reference-Cited by-同舟云学术

Cyclic evolution of the electron temperature and density in dusty low-pressure radio frequency plasmas with pulsed injection of hexamethyldisiloxane

Published:2015-11-02 Issue:18 Volume:107 Page:183104
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Garofano V.¹^ORCID,Stafford L.¹,Despax B.²^ORCID,Clergereaux R.²,Makasheva K.²

Affiliation:

1. Département de Physique, Université de Montréal, Montréal, Québec H3C 3J7, Canada

2. LAPLACE (Laboratoire Plasma et Conversion d'Energie), Université de Toulouse, CNRS, UPS, INPT, 118 route de Narbonne, F-31062 Toulouse Cedex 9, France

Funder

FCS RTRA-STAE in France, project 3PCkeys

Canadian Network for Research and Innovation in Machining Technology, Natural Sciences and Engineering Research Council of Canada (CANRIMT, NSERC)

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4935030

Reference32 articles.

1. In situ laser diagnostic studies of plasma‐generated particulate contamination

2. Particulate formation and dusty plasma behaviour in argon-silane RF discharge

3. Industrial developments of scientific insights in dusty plasmas

4. Nonthermal plasma synthesis of semiconductor nanocrystals

5. Experiment and modelling of very low frequency oscillations in RF-PECVD: a signature for nanocrystal dynamics

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