1. Advanced Research Center for Nanolithography (ARCNL), Science Park 110, 1098 XG Amsterdam, The Netherlands
2. Department of Physics and Astronomy, and LaserLaB, Vrije Universiteit Amsterdam, De Boelelaan 1081, 1081 HV Amsterdam, The Netherlands
3. Keldysh Institute of Applied Mathematics, Miusskaya Square 4, 125047 Moscow, Russia
4. RnD-ISAN, Promyshlennaya Street 1A, Troitsk, 142191 Moscow, Russia
5. Zernike Institute for Advanced Materials, University of Groningen, Nijenborgh 4, 9747 AG Groningen, The Netherlands