Author:
Terrill K. W.,Byrne P. F.,Hu C.,Cheung N. W.
Subject
Physics and Astronomy (miscellaneous)
Cited by
14 articles.
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1. Defects in annealed 1.5 MeV boron implanted p-type silicon;Journal of Electronic Materials;2001-07
2. Chapter 1 Ion Implantation into Semiconductors: Historical Perspectives;Semiconductors and Semimetals;1997
3. A cw 4-rod RFQ linac;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;1994-06
4. Damage and Its Rapid Thermal Annealing Behavior of 1 MeVAr+-Ion-ImplantedSilicon;Japanese Journal of Applied Physics;1994-02-15
5. MeV Boron Implantation and Masking;MRS Proceedings;1993