Thermal effects on laser-assisted field evaporation from a Si surface: A real-time first-principles study
Author:
Affiliation:
1. Department of Physics, Tokyo University of Science, 1-3 Kagurazaka, Shinjuku, Tokyo 162-8601, Japan
Funder
Japan Society for the Promotion of Science
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5090949
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1. Ab initio simulations of ultrashort laser pulse interaction with Cl–Si(100): implications for atomic layer etching;Physical Chemistry Chemical Physics;2023
2. Theoretical Insights into Energy Absorption and Charge Draining during Field Evaporation Assisted by Femtosecond Laser Pulses;The Journal of Physical Chemistry A;2021-10-15
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