1. Center for Single Nanoscale Innovative Devices, Japan Advanced Institute of Science and Technology (JAIST), 2-13 Asahidai, Nomi, Ishikawa 923-1211, Japan
2. Japan Science and Technology Agency (JST), ERATO, Shimoda Nano-Liquid Process Project, 2-13 Asahidai, Nomi, Ishikawa 923-1211, Japan
3. Fine & Electrochemical Division, Mitsubishi Materials Electronic Chemicals Co., Ltd, 3-1-6 Barajima, Akita City, Akita 010-8585, Japan
4. School of Materials Science, Japan Advanced Institute of Science and Technology (JAIST), 1-1 Asahidai, Nomi, Ishikawa 923-1292, Japan
5. Central Research Institute, Mitsubishi Materials Corporation, 1002-14 Mukohyama, Naka, Ibaraki 311-0102, Japan