Azimuthally extreme-ultraviolet focal splitter by modified spiral photon sieves

Abstract

Extreme Ultraviolet (EUV) radiation is a short-wavelength light source that has important applications in many fields, such as optical communication, particle manipulation, and ultrahigh resolution imaging. However, the highly absorptive nature of EUV light makes it challenging to design suitable focusing optics, such as focal splitters, to properly manipulate the energetic light. Here, we propose modified spiral photon sieves to transform EUV laser light into azimuthally splitting focusing. A genetic algorithm was used to design and optimize the azimuthally focal splitters. A capillary discharge EUV laser at 46.9 nm was used to verify the effectiveness of our proposed method, and PMMA targets were used to record the focused laser spot. The profile of the recorded patterns measured by atomic force microscopy shows that the focal spots in the experiment are diffraction-limited and agreed with the theoretical analysis. The proposed technique provides a new way for manipulating EUV light and further extends the applications ranging from EUV to soft x rays.