A high-efficiency room-temperature surface wave plasma jet based on a rectangular waveguide

Abstract

Microwave plasma jets have garnered significant attention due to their unique advantages and wide applications in numerous fields. However, the frequent collisions between electrons and neutral particles at atmospheric pressure make it challenging to generate a room-temperature plasma jet and maintain a high energy efficiency at the same time. This paper introduces a new microwave plasma jet based on a rectangular waveguide, which utilizes the surface wave propagating along the plasma jet to sustain the gas discharge. It features a simple structure, low power consumption, high energy efficiency, and strong controllability without the need for any external tuning measures. The minimum power required to ignite and stably maintain the plasma jet at atmospheric pressure is as low as 25 W and the measured lowest gas temperature at the plasma jet tail is approximately 295 K. Meanwhile, experiments show the microwave energy efficiency can be higher than 90% in a large range of input powers and gas inflow rates, while the gas temperature is maintained close to room temperature. These characteristics of our proposed surface wave plasma jet demonstrate tremendous potential in fields such as hemostasis, sterilization, wastewater treatment, semiconductor cleaning, and material processing.