Improvement of leakage current characteristics of Ba0.5Sr0.5TiO3 films by N2O plasma surface treatment-Reference-Cited by-同舟云学术

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Improvement of leakage current characteristics of Ba0.5Sr0.5TiO3 films by N2O plasma surface treatment

Published:1997-12 Issue:22 Volume:71 Page:3221-3223
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Cho Hag-Ju,Oh Sejun,Kang Chang Seok,Hwang Cheol Seong,Lee Byoung Taek,Lee Ki Hoon,Horii Hideki,Lee Sang In,Lee Moon Yong

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.120296

Reference4 articles.

1. Deposition of extremely thin (Ba,Sr)TiO3 thin films for ultra‐large‐scale integrated dynamic random access memory application

2. Leakage current reduction in chemical-vapor-deposited Ta2O5 films by rapid thermal annealing in N2O

3. Thermal Desorption Spectroscopy of(Ba,Sr)TiO3Thin Films Prepared by Chemical Vapor Deposition

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