Controlled focused electron beam-induced etching for the fabrication of sub-beam-size nanoholes
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2839334
Reference22 articles.
1. Focused, Nanoscale Electron-Beam-Induced Deposition and Etching
2. Nanostructure Fabrication by Ultra-High-Resolution Environmental Scanning Electron Microscopy
3. The size dependence of the nano-dots formed by electron-beam-induced deposition on the partial pressure of the precursor
4. Ultimate sized nano-dots formed by electron beam-induced deposition using an ultrahigh vacuum transmission electron microscope
5. Approaching the Resolution Limit of Nanometer-Scale Electron Beam-Induced Deposition
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