Characterization of a remote hydrogen plasma reactor with electron spin resonance
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.348655
Reference23 articles.
1. Hydrogen incorporation in silicon thin films deposited with a remote hydrogen plasma
2. Use of Paramagnetic‐Resonance Techniques in the Study of Atomic Oxygen Recombinations
3. Studies of Hydroxyl Radical Kinetics by Quantitative ESR
4. Atom—Molecule Kinetics at High Temperature Using ESR Detection. Technique and Results for O +H2, O +CH4, and O +C2H6
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