Localized subsurface modification of materials using micro-low-energy multiple ion beamlets
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3664753
Reference39 articles.
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2. Microconical Structure Formation and Field Emission From Atomically Heterogeneous Surfaces Created by Microwave Plasma–Based Low-Energy Ion Beams;Frontiers in Physics;2021-06-08
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