Low stiffness tactile transducers based on AlN thin film and polyimide-Reference-Cited by-同舟云学术

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Low stiffness tactile transducers based on AlN thin film and polyimide

Published:2015-04-20 Issue:16 Volume:106 Page:162901
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Mastronardi V. M.¹²,Ceseracciu L.³,Guido F.¹⁴,Rizzi F.¹,Athanassiou A.³,De Vittorio M.¹⁴,Petroni S.¹

Affiliation:

1. Center for Biomolecular Nanotechnologies at UNILE, Istituto Italiano di Tecnologia, Via Barsanti, 73010 Arnesano, LE, Italy

2. Dip. Scienza Applicata e Tecnologia, Politecnico di Torino, Torino 10129, Italy

3. Smart Materials, Istituto Italiano di Tecnologia, via Morego, 16163 Genova, Italy

4. Dip. Ingegneria dell'Innovazione, Università del Salento, Lecce 73100, Italy

Funder

ITEM Program Infrastructure (PONa3_00077)

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4918749

Reference24 articles.

1. A traction stress sensor array for use in high-resolution robotic tactile imaging

2. Capacitive Micro Pressure Sensor Integrated with a Ring Oscillator Circuit on Chip

3. A Polymer-Based Flexible Tactile Sensor for Both Normal and Shear Load Detections and Its Application for Robotics

4. Normal and Shear Force Measurement Using a Flexible Polymer Tactile Sensor With Embedded Multiple Capacitors

5. A Polymer-Based Capacitive Sensing Array for Normal and Shear Force Measurement

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3. Current Trends on Surface Acoustic Wave Biosensors;Advanced Materials Technologies;2021-03-31

4. GHz AlN-based multiple mode SAW temperature sensor fabricated on PEN substrate;Sensors and Actuators A: Physical;2020-11

5. Wearable piezoelectric mass sensor based on pH sensitive hydrogels for sweat pH monitoring;Scientific Reports;2020-07-02

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