Laser assisted heating of extreme ultraviolet-emitting z-pinch plasmas
Author:
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3042214
Reference22 articles.
1. Soft X-Rays and Extreme Ultraviolet Radiation
2. Pinching evidences in a miniature plasma focus with fast pseudospark switch
3. Soft x-ray emission from a pulsed gas discharge in a pseudosparklike electrode geometry
4. A multi-kilohertz pinch plasma radiation source for extreme ultraviolet lithography
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2. Emission Spectra of Molecular Gases N2 and CO2 in the Range of 3–20 nm upon Pulsed Laser Excitation of Various Gas-Jet Targets;Optics and Spectroscopy;2021-12-25
3. Matrix detector to determine the spatial distribution of VUV-radiation from plasma diode;Physics of Plasmas;2021-05
4. Extreme ultraviolet plasma spectroscopy of a pseudospark XUV source;Journal of Analytical Atomic Spectrometry;2020
5. Recycling of laser and plasma radiation energy for enhancement of extreme ultraviolet sources for nanolithography;Journal of Applied Physics;2018-01-07
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