A technique for projection x‐ray lithography using computer‐generated holograms
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.351003
Reference17 articles.
1. Reduction imaging at 14 nm using multilayer-coated optics: Printing of features smaller than 0.1 μm
2. Reflective systems design study for soft x-ray projection lithography
3. Holographic projection of microcircuit patterns
4. Resolution in Holography
5. IMPROVED RESOLUTION AND SIGNAL‐TO‐NOISE RATIOS IN TOTAL INTERNAL REFLECTION HOLOGRAMS
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2. Research methods for comparison of reconstructed by a hologram projector Fresnel images;Optical Design and Engineering VII;2018-06-12
3. Single spherical mirror optic for extreme ultraviolet lithography enabled by inverse lithography technology;Optics Express;2014-10-07
4. Method of synthesizing hologram projectors based on breaking down the structure of an object into typical elements, and a software package for implementing it;Journal of Optical Technology;2012-12-31
5. Extreme ultraviolet lithography with table top lasers;Progress in Quantum Electronics;2010-07
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