Properties of electron swarms in CF3I
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3224197
Reference12 articles.
1. Electron Interactions With Plasma Processing Gases: An Update for CF4, CHF3, C2F6, and C3F8
2. Electron Interactions with CF4
3. Electron Interactions With CF3I
4. Mobility, diffusion and attachment of electrons in perfluoroalkanes
5. The ionisation and attachment coefficients in carbon tetrafluoride
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