Author:
Padovani Andrea,Larcher Luca,Della Marca Vincenzo,Pavan Paolo,Park Hokyung,Bersuker Gennadi
Subject
General Physics and Astronomy
Reference24 articles.
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5. Charge trapping and dielectric reliability of SiO/sub 2/-Al/sub 2/O/sub 3/ gate stacks with TiN electrodes
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