An optical method based auto-collimation for measuring five degrees of freedom error motions of rotary axis

Abstract

The paper presents an optical method based on auto-collimation to simultaneously measure five degrees of freedom error motions of the rotary axis. The proposed method consists of the collimated lasers, beam splitters, focusing lens, quadrant photodiode detectors, a high-precision steel ball, and a special mirror fixed to the rotary axis. The mathematical model is established byoptical ray tracing, and the corresponding optical path is also simulated by OpticStudio. Meanwhile, an adjusting mechanism for X–Y micro-displacement, based on the elastic deformation of the material, is designed to adjust the installation eccentricity error of the high-precision steel ball. The calibration results of the proposed system demonstrate that the displacement errors are ±0.25 µm within the measuring range of ±10 µm, and the tilt angle errors are ±0.6 arcsec within the measuring range of ±25 arcsec. Taking a direct drive (DD) motor as the test object, the radial error motions of the rotary axis range from −3.2 to 4.1 µm, the axial error motions range from −4.9 to 4.7 µm, and the tilt error motions around the X and Y axes range from −2.8 to 1.8 arcsec and −2.6 to 2.0 arcsec, respectively.