Partial compensation interferometry measurement system for parameter errors of conicoid surface-Reference-Cited by-同舟云学术

Partial compensation interferometry measurement system for parameter errors of conicoid surface

Published:2018-06 Issue:6 Volume:89 Page:063102
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Hao Qun¹,Li Tengfei¹,Hu Yao¹,Wang Shaopu¹,Ning Yan¹,Chen Zhuo¹

Affiliation:

1. Beijing Key Laboratory for Precision Optoelectronic Measurement Instrument and Technology, School of Optics and Photonics, Beijing Institute of Technology, Beijing, 100081, China

Funder

National Major Scientific Instruments and Equipment Development Project of China

National Natural Science Foundation of China

Publisher

AIP Publishing

Subject

Instrumentation

Link

http://aip.scitation.org/doi/pdf/10.1063/1.5027146

Reference31 articles.

1. Development of aspheric surface profilometry using curvature method

2. Principles of Optics

3. Analytical Jacobian and its application to tilted-wave interferometry

4. Design method of surface contour for a freeform lens with wide linear field-of-view

5. Modified three-step iterative algorithm for phase-shifting interferometry in the presence of vibration

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