Continuous ultraviolet emissions produced by electron impact on SF6 and NF3
Author:
Publisher
AIP Publishing
Subject
Physical and Theoretical Chemistry,General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.453833
Reference40 articles.
1. Numerical modeling of looped C-V Characteristics in Ap+n junction containing mid-bandgap electron traps
2. Comparison of the Etching and Plasma Characteristics of Discharges in CF 4 and NF 3
3. Absolute cross sections for fluorine 3p→3s line emissions following single electron impact on NF3, CF4, and SF6
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