Isotope enrichment in sputter deposits
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.89344
Reference4 articles.
1. Low energy ion scattering: Elastic and inelastic effects
2. Angular Distribution of Sputtered Material
3. Sputtering of chemisorbed gas (nitrogen on tungsten) by low‐energy ions
4. Controlled Sputtering of Metals by Low-Energy Hg Ions
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1. Modified Sigmund sputtering theory: isotopic puzzle;Radiation Effects and Defects in Solids;2005-05
2. Energy and mass dependence of isotopic enrichment in sputtering;Applied Physics A: Materials Science & Processing;2003-05-01
3. Pronounced composition gradients in alloys under low-energy ion implantation at high fluence;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2000-04
4. On the preferential emission of heavy isotopes in sputtering;Vacuum;1999-03
5. Preferential sputtering of heavy isotopes at low incident ion energies;Surface Science;1997-12
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