Fabricating tunable semiconductor devices with an atomic force microscope
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.124620
Reference16 articles.
1. Fabrication of nanometer structures using STM
2. Control of Current in 2DEG Channel by Oxide Wire Formed Using AFM
3. Fabrication of nanometer‐scale side‐gated silicon field effect transistors with an atomic force microscope
4. Fabrication of Si nanostructures with an atomic force microscope
5. Fabrication of 0.1 μm metal oxide semiconductor field‐effect transistors with the atomic force microscope
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