Characterisation of multi roof tile-shaped out-of-plane vibrational modes in aluminium-nitride-actuated self-sensing micro-resonators in liquid media-Reference-Cited by-同舟云学术

Characterisation of multi roof tile-shaped out-of-plane vibrational modes in aluminium-nitride-actuated self-sensing micro-resonators in liquid media

Author:

Kucera Martin¹²,Wistrela Elisabeth¹,Pfusterschmied Georg¹,Ruiz-Díez Víctor³,Sánchez-Rojas José Luis³,Schalko Johannes¹,Bittner Achim¹,Schmid Ulrich¹

Affiliation:

1. Institute of Sensor and Actuator Systems, Vienna University of Technology, Floragasse 7, 1040 Vienna, Austria

2. Austrian Centre of Competence for Tribology, AC2T research GmbH, Viktor-Kaplan-Straße 2, 2700 Wr. Neustadt, Austria

3. Group of Microsystems, Actuators and Sensors, E.T.S.I. Industriales, Universidad de Castilla-La Mancha, 13071 Ciudad Real, Spain

Funder

FPU

Spanish Ministerio de EconomÃa y Competividad

Österreichische Forschungsförderungsgesellschaft (Austrian Research Promotion Agency)

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

Reference21 articles.

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