A metal/insulator tunnel transistor with 16 nm channel length
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.124109
Reference6 articles.
1. Design of ion-implanted MOSFET's with very small physical dimensions
2. Theoretical Consideration of a New Nanometer Transistor Using Metal/Insulator Tunnel-Junction
3. A metal/oxide tunneling transistor
4. Nanoscale metal transistor control of Fowler–Nordheim tunneling currents through 16 nm insulating channel
5. Nanometer Pattern-Mask Fabricated by Conventional Photolithography
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