Effect of antenna capacitance on the plasma characteristics of an internal linear inductively coupled plasma system
Author:
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2967895
Reference11 articles.
1. On the E - H mode transition in RF inductive discharges
2. Characterization of Inductively-Coupled RF Plasma Sources with Multiple Low-Inductance Antenna Units
3. Inductively coupled plasmas: Optimizing the inductive-coupling efficiency for large-area source design
4. Comparison of external and internal planar radio frequency antennae for inductively coupled plasma
5. The influence of antenna configuration and standing wave effects on density profile in a large-area inductive plasma source
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1. Sensitivity and spatial selectivity of transverse field RF surface coils: A theoretical and experimental study at 2.35T;NUOVO CIM C-COLLOQ C;2013
2. Plasma generation by inductive coupling with a planar resonant RF network antenna;Journal of Physics D: Applied Physics;2012-02-10
3. Plasma Characteristics of Internal Inductively Coupled Plasma Source with Ferrite Module;Plasma Chemistry and Plasma Processing;2011-02-27
4. A theoretical and experimental study on transverse field radio frequency surface coils;Measurement;2010-12
5. Characteristics of internal inductively coupled plasma with a ferrite module;Journal of Physics D: Applied Physics;2010-02-19
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