Control of the Schottky barrier height in monolayer WS2 FETs using molecular doping

Abstract

Developing controllable doping processes for two-dimensional (2D) semiconductors is critical to developing next-generation electronic and optoelectronic devices. Understanding the nature of the contacts is an essential step in realizing efficient charge injection in transition metal dichalcogenides. In this study, post-growth n-doping of chemical vapor deposition grown monolayer (1 L) WS2 is achieved through molecular reductant solution treatment. The doping level can be effectively controlled by the treatment time and dopant solution concentrations. The doped WS2 field-effect transistors showed profound threshold voltage shifts and tunable channel currents. This molecular n-doping technique is beneficial for the selective area doping needed for electrical contacts and reduces the contact resistance ( Rc) in 1 L WS2 by more than two orders of magnitude. The significant reduction of Rc is attributed to the high electron-doping density achieved in WS2, which leads to a significant reduction of the Schottky barrier height. The dependence of mobility on temperature indicates clear evidence of the strong suppression of charge-impurity scattering after doping. High levels of doping allow the observation of a metal–insulator transition in monolayer WS2 due to strong electron–electron interactions. This doping technique provides a viable route for tailoring the electrical properties and improving the contacts in transition metal dichalcogenides, paving the way for high-performance 2D nanoelectronic devices.