X-ray diffuse scattering from threading dislocations in epitaxial GaN layers
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3460803
Reference17 articles.
1. Determination of dislocation density in epitaxially grown GaN using an HCl etching process
2. Defect structure of epitaxial GaN films determined by transmission electron microscopy and triple-axis X-ray diffractometry
3. The estimation of dislocation densities in metals from X-ray data
4. The measurement of threading dislocation densities in semiconductor crystals by X-ray diffraction
5. Bragg and Laue x-ray diffraction study of dislocations in thick hydride vapor phase epitaxy GaN films
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