1. State Key Laboratory of Silicon Materials and School of Materials Science and Engineering, Zhejiang University, Hangzhou 310027, China
2. Hangzhou Innovation Center, Zhejiang University, Hangzhou 311200, China
3. Zhejiang Province Key Laboratory of Quantum Technology and Device & Department of Physics, Zhejiang University, Hangzhou 310027, China
4. School of Materials Science and Engineering & Henan Institute of Advanced Technology, Zhengzhou University, Zhengzhou, Henan 450001, China