Assessment of dry etching damage in permalloy thin films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.370014
Reference9 articles.
1. An Overview of Dry Etching Damage and Contamination Effects
2. Effect of Irradiation on Magnetic Properties of Fe‐Ni Alloys
3. Effects of Ion Irradiation on Ferromagnetic Thin Films
4. Effect of Neutron Irradiation of the Magnetic Properties and Degree of Order of Magnetic Metal Alloys
5. Effects of Ion Beam Etching on the Magnetic Properties of Permalloy Thin Films
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