Physicochemical, structural, and mechanical properties of Si3N4 films annealed in O2
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3359655
Reference48 articles.
1. Oxidation resistance of TiN, CrN, TiAlN and CrAlN coatings deposited by lateral rotating cathode arc
2. Industrial applications of superhard nanocomposite coatings
3. New hard/lubricant coating for dry machining
4. Relationship of chemical and structural properties with the tribological behavior of sputtered SiCN films
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