Effect of uniaxial strain on anisotropic diffusion in silicon
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2362980
Reference19 articles.
1. A 90-nm Logic Technology Featuring Strained-Silicon
2. Boron diffusion in strainedSi1−xGexepitaxial layers
3. Comparison of boron diffusion in Si and strained Si1−xGexepitaxial layers
4. Diffusion in strained Si(Ge)
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