Post-fabrication frequency trimming of coplanar-waveguide resonators in circuit QED quantum processors-Reference-Cited by-同舟云学术

Post-fabrication frequency trimming of coplanar-waveguide resonators in circuit QED quantum processors

Published:2023-07-17 Issue:3 Volume:123 Page:
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:

Author:

Vallés-Sanclemente S.¹²^ORCID,van der Meer S. L. M.¹²^ORCID,Finkel M.¹²^ORCID,Muthusubramanian N.¹²^ORCID,Beekman M.¹³^ORCID,Ali H.¹²^ORCID,Marques J. F.¹²^ORCID,Zachariadis C.¹²^ORCID,Veen H. M.¹²^ORCID,Stavenga T.¹²,Haider N.¹³^ORCID,DiCarlo L.¹²^ORCID

Affiliation:

1. QuTech, Delft University of Technology 1 , P.O. Box 5046, 2600 GA Delft, The Netherlands

2. Kavli Institute of Nanoscience, Delft University of Technology 2 , P.O. Box 5046, 2600 GA Delft, The Netherlands

3. Netherlands Organisation for Applied Scientific Research (TNO) 3 , P.O. Box 96864, 2509 JG The Hague, The Netherlands

Abstract

We present the use of a set of airbridges to trim the frequency of microwave coplanar-waveguide (CPW) resonators post-fabrication. This method is compatible with the fabrication steps of conventional CPW airbridges and crossovers and increases device yield by allowing compensation of design and fabrication uncertainty with 100 MHz range and 10 MHz resolution. We showcase two applications in circuit QED. The first is the elimination of frequency collisions between resonators intended to readout different transmons by frequency-division multiplexing. The second is frequency matching of readout and Purcell-filter resonator pairs. Combining this matching with transmon frequency trimming by laser annealing reliably achieves fast and high-fidelity readout across 17-transmon quantum processors.

Funder

Netherlands Organization for Scientific Research

U.S. Army Research Office

Intel Corporation

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

https://pubs.aip.org/aip/apl/article-pdf/doi/10.1063/5.0148222/18051172/034004_1_5.0148222.pdf

Reference26 articles.

1. Laser-annealing Josephson junctions for yielding scaled-up superconducting quantum processors