1. Osten, W. (Ed.). (2019). Optical Inspection of Microsystems, Second Edition (2nd ed.). CRC Press.
2. Review of surface profile measurement techniques based on optical interferometry
3. R. Leach, “The Measurement of Surface Texture Using Stylus Instruments”: NPL Management Limited ISBN: ISSN: 1368-6550
4. Paul Kumar U., N. Krishna Mohan and M.P. Khothiyal, Journal of Optics 40(4), 2011
5. Chapter 3, Optical Inspection of Microsystems-“A Metrological Characteristics Approach to Uncertainty in Surface Metrology” by Richard Leach, Han Haitjema, and Claudiu Giusca (Second Edition, 2019)