1. Institute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf 1 , Bautzner Landstrasse 400, 01328 Dresden, Germany
2. Institute of Materials Science and Max Bergmann Center, Technische Universität Dresden 2 , 01069 Dresden, Germany
3. Institute of Semiconductor Electronics, Rheinisch-Westfälische Technische Hochschule Aachen 3 , 52074 Aachen, Germany
4. Institute of Physics, Maria Curie-Sklodowska University in Lublin 4 , M. Curie-Sklodowskiej 1, 20-031 Lublin, Poland
5. Center for Advancing Electronics Dresden, Technische Universität Dresden 5 , 01062 Dresden, Germany
6. Institute of Electronics, Bulgarian Academy of Sciences 6 , 72, Tsarigradsko Chausse Blvd., 1784 Sofia, Bulgaria