Nonlinear dynamics in aluminum nitride contour-mode resonators
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4861461
Reference12 articles.
1. Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS Resonators
2. Integrated aluminum nitride piezoelectric microelectromechanical system for radio front ends
3. Super-high-frequency two-port AlN contour-mode resonators for RF applications
4. 1.05-GHz CMOS oscillator based on lateral- field-excited piezoelectric AlN contour- mode MEMS resonators
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1. Multipurpose Acoustic Metamaterial Anchors for Aluminum Scandium Nitride Contour Mode Resonators;Journal of Microelectromechanical Systems;2024-08
2. Extending the Linearity of AlScN Contour-Mode Resonators Through Acoustic Metamaterials-Based Reflectors;IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control;2023-10
3. Experimental Investigation of the Temperature and Power Handling Performance of a 2.3GHz AlN Based LCAT Mode Resonator;2019 IEEE International Ultrasonics Symposium (IUS);2019-10
4. Methods for precisely controlling the residual stress and temperature coefficient of the frequency of a MEMS resonator based on an AlN cavity silicon-on-insulator platform;Journal of Micromechanics and Microengineering;2016-05-20
5. Spurious-free Lamb wave resonators with protrusion structures;Applied Physics Letters;2015-12-14
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