Soft landing of silicon nanocrystals in plasma enhanced chemical vapor deposition
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2204439
Reference19 articles.
1. Let there be light
2. Single-Electron Tunneling Devices Based on Silicon Quantum Dots Fabricated by Plasma Process
3. Time-resolved imaging of gas phase nanoparticle synthesis by laser ablation
4. Synthesis and characterization of aerosol silicon nanocrystal nonvolatile floating-gate memory devices
5. Growth and optoelectronic properties of polymorphous silicon thin films
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