1. School of Physics and Electronics Science, Hunan University of Science and Technology, Hunan Provincial Key Laboratory of Intelligent Sensors and New Sensor Materials 1 , Xiangtan 411201, China
2. College of Materials Engineering, North China Institute of Aerospace Engineering 2 , Langfang 065000, People's Republic of China
3. Institute of Microelectronics and Key Laboratory of Science and Technology on Silicon Devices, Chinese Academy of Sciences 3 , Beijing 100029, China