5GHz surface acoustic wave devices based on aluminum nitride/diamond layered structure realized using electron beam lithography
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2208372
Reference9 articles.
1. High Frequency Surface Acoustic Wave Filter Using ZnO/Diamond/Si Structure
2. CVD Diamond for Surface Acoustic Wave Filters
3. Smooth and oriented AlN thin films deposited by laser ablation and their application for SAW devices
4. Surface acoustic wave propagation in aluminum nitride-unpolished freestanding diamond structures
5. High velocity SAW using aluminum nitride film on unpolished nucleation side of free-standing CVD diamond
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