Measurement of ion temperatures in a large-diameter electron cyclotron resonance plasma
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1416154
Reference14 articles.
1. Microwave ion source
2. Microwave Plasma Etching
3. Low Temperature Chemical Vapor Deposition Method Utilizing an Electron Cyclotron Resonance Plasma
4. Broadening of the parallel and perpendicular ion energy spectrum and correlation with turbulent potential fluctuations in a linear magnetized plasma
5. Cold and Low-Energy Ion Etching (COLLIE)
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