Electrical and electroluminescent characterization of nanometric multilayers of SiOX/SiOY obtained by LPCVD including non-normal emission
Author:
Affiliation:
1. Instituto Nacional de Astrofísica, Óptica y Electrónica (INAOE), Apdo. 51 y 216, Puebla 72000, Mexico
Funder
Consejo Nacional de Ciencia y Tecnología (CONACYT)
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4952730
Reference25 articles.
1. Electroluminescence in MOS structures with Si/SiO2 nanometric multilayers
2. Structural characteristics of a multilayer of silicon rich oxide (SRO) with high Si content prepared by LPCVD
3. On the photoluminescence of multilayer arrays of silicon rich oxide with high silicon content prepared by low pressure chemical vapor deposition
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