Reconstruction of three-dimensional chemistry and geometry using focused ion beam microscopy
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.125311
Reference13 articles.
1. High‐resolution focused ion beams
2. A mass‐separating focused‐ion‐beam system for maskless ion implantation
3. Secondary ion mass spectrometric image depth profiling for three-dimensional elemental analysis
4. New Developments in Spatially Multidimensional Ion Microprobe Analysis
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