Formation of rectilinearly wide plasmas by a slotted waveguide under electron cyclotron resonance
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1146654
Reference4 articles.
1. Large-Area Electron Cyclotron Resonance Plasma Source with Permanent Magnets
2. Diamond-Like Carbon Film Deposition by Super-Wide Electron-Cyclotron Resonance Plasma Source Excited by Traveling Microwave
3. Plasma acceleration by electromagnetic and magnetostatic field gradients
4. Identification of Dissipative Drift Waves by Microwave Scattering in a Moderately Ionized Plasma
Cited by 1 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Formation of uniform titanium dioxide films by sputtering of tapered targets in an electron cyclotron resonance plasma;Review of Scientific Instruments;1998-02
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