Controllable laser‐induced periodic structures at silicon–dioxide/silicon interface by excimer laser irradiation
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.363779
Reference12 articles.
1. Semiconductor Surface Damage Produced by Ruby Lasers
2. Laser mirror damage in germanium at 10.6 μm
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