Fabrication for multilayered composite thin films by dual-channel vacuum arc deposition
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2937195
Reference17 articles.
1. Industrial scale manufactured superlattice hard PVD coatings
2. Hard multilayer coatings containing TiN and/or ZrN: A review and recent progress in their nanoscale characterization
3. Interdependence between stress and texture in arc evaporated Ti–Al–N thin films
4. Attempt to Design a Strong Solid
5. Strength enhancement in thin‐layered Al‐Cu laminates
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1. Properties of Ti-Si-N Hard Coatings Prepared by Filtered Vacuum Arc Source and Magnetron Sputtering Cathode;MRS Proceedings;2009
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