Use of a helicon-wave excited plasma for aluminum-doped ZnO thin-film sputtering
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.120707
Reference16 articles.
1. The Performance of Cu(In, Ga)Se2-Based Solar Cells in Conventional and Concentrator Applications
2. Preparations of ZnO:Al transparent conducting films by d.c. magnetron sputtering
3. Group III Impurity Doped Zinc Oxide Thin Films Prepared by RF Magnetron Sputtering
4. Textured aluminum‐doped zinc oxide thin films from atmospheric pressure chemical‐vapor deposition
5. Electroless deposition of cadmium stannate, zinc oxide, and aluminum‐doped zinc oxide films
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