Author:
Ito Kenji,Yu Run-Sheng,Sato Kiminori,Hirata Kouichi,Kobayashi Yoshinori,Kurihara Toshikazu,Egami Miki,Arao Hiroki,Nakashima Akira,Komatsu Michio
Subject
General Physics and Astronomy
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3. A Reliability Study of Barrier-Metal-Clad Copper Interconnects With Self-Aligned Metallic Caps
4. Proceedings of IEEE 2003 International Interconnect Technology Conference;Ikeda M.,2003
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