Author:
Pomrenke Gernot S.,Hengehold Robert L.,Yeo Yung Kee,Brown Ian G.,Solomon James S.
Subject
General Physics and Astronomy
Cited by
8 articles.
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1. Vacuum arc ion sources;Review of Scientific Instruments;1994-10
2. Metal ion implantation: Conventional versus immersion;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1994-03
3. Metal ion implantation for large scale surface modification;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1993-07
4. Vacuum arc ion sources for particle accelerators and ion implantation;IEEE Transactions on Plasma Science;1993
5. Chapter 5 Transition Metals in III/V Compounds;Imperfections in III/V Materials;1993