The precipitation of Fe at the Si–SiO2 interface
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.366643
Reference15 articles.
1. Leakage and Breakdown in Thin Oxide Capacitors—Correlation with Decorated Stacking Faults
2. Behavior of Defects Induced by Metallic Impurities on Si(100) Surfaces
3. Transmission Electron Microscopy Observation of Defects Induced by Fe Contamination on Si(100) Surface
4. Catastrophic breakdown in silicon oxides: The effect of Fe impurities at the SiO2‐Si interface
5. Degradation of Gate Oxide Integrity by Metal Impurities
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