Effect of precursor gas on the structure and mechanical properties of hydrogenated amorphous carbon films deposited on a trench sidewall
Author:
Affiliation:
1. Department of Mechanical Engineering, Tokyo Institute of Technology, 2-12-1 O-okayama, Meguro-ku, Tokyo, Japan
2. Department of Mechanical Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo, Japan
Funder
JKA
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5080471
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1. Tribology of Diamond-Like Carbon Films
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5. Analysis of microstructure and surface morphology of a-C:H films deposited on a trench target
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